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Materials and processes for next generation lithography / edited by Alex Robinson, Richard Lawson.

Contributor(s): Series: Frontiers of nanoscience ; v. 11.Publisher: Amsterdam : Elsevier, [2016]Description: xxv, 608 pages : illustrations ; 25 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 9780081003541
  • 0081003544
Subject(s): Additional physical formats: ebook version :: No titleDDC classification:
  • 621.38153 23 M426
Item type: كتاب
Tags from this library: No tags from this library for this title.
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Item type Current library Call number Status Notes Date due Barcode
كتاب كتاب Central Library المكتبة المركزية 621.38153 M426 (Browse shelf(Opens below)) Available قاعة الكتب 37807

Includes index.