Mechanical design of microresonators : modeling and applications - Lobontiu, Nicolae (New York : McGraw-Hill, 2006)
Includes bibliographical references and index.
Keywords: Microelectromechanical systems -- Design and construction; Electric resonators -- Design and construction; Vibrators -- Design and construction; Detectors -- Design and construction; Microresonators (Optoelectronics); Optoelectronic devices; Optical resonance