TY  - BOOK
AU  - Lobontiu,Nicolae
TI  - Mechanical design of microresonators: modeling and applications 
SN  - 0071455388
U1  - 621.381   22
PY  - 2006///
CY  - New York
PB  - McGraw-Hill
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Electric resonators
KW  - Vibrators
KW  - Detectors
KW  - Microresonators (Optoelectronics)
KW  - Optoelectronic devices
KW  - Optical resonance
N1  - Includes bibliographical references and index
ER  -