TY  - BOOK
AU  - Nur,Omer
AU  - Willander,Magnus
TI  - Low temperature chemical nanofabrication: recent progress, challenges and emerging technologies 
T2  - ( Micro & nano technologies series )
SN  - 9780128133453
U1  - 620.5 23
PY  - 2020///]
CY  - Cambridge, MA
PB  - William Andrew
KW  - Nanomanufacturing
N1  - Includes bibliographical references and index
ER  -