Practical Scanning Electron Microscopy : Electron and Ion Microprobe Analysis / edited by Joseph I. Goldstein, Harvey Yakowitz.

electron and microprobe analysis

I Introduction -- I. Evolution of the Scanning Electron Microscope -- II. Evolution of the Electron Probe Microanalyzer -- III. Combination SEM-EPMA -- IV. Outline and Purpose of This Book -- References -- Bibliography of Texts and Monographs in SEM and EPMA -- II Electron Optics -- I. Electron Guns -- II. Electron Lenses -- III. Electron Probe Diameter dp vs. Electron Probe Current i -- IV. Depth of Field -- References -- III Electron Beam-Specimen Interaction -- I. Electron Scattering in Solids -- II. Electron Range and Spatial Distribution of the Primary Electron Beam -- III. Emitted Electrons -- Backscattered Electrons -- IV. Emitted Electrons -- Low-Energy Electrons -- V. X-Rays -- VI. Auger Electrons -- VII. Summary -- Range and Spatial Resolution -- References -- IV Image Formation in the Scanning Electron Microscope -- I. The SEM Imaging Process -- II. Signal Detectors -- III. Contrast Formation -- IV. Signal Characteristics and Image Quality -- V. Resolution Limitations in the SEM -- VI. Signal Processing -- VII. Image Defects -- VIII. Electron Penetration Effects in Images -- References -- V Contrast Mechanisms of Special Interest In Materials Science -- I. Introduction -- II. Electron Channeling Contrast -- III. Magnetic Contrast in the SEM -- IV. Voltage Contrast -- V. Electron-Beam-Induced Current (EBIC) -- VI. Cathodoluminescence -- References -- VI Specimen Preparation, Special Techniques, and Applications of the Scanning Electron Microscope -- I. Specimen Preparation for Materials Examination in the SEM -- II. Stereomicroscopy -- III. Dynamic Experiments in the SEM -- IV. Applications of the SEM -- References -- VII X-Ray Spectral Measurement and Interpretation -- I. Introduction -- II. Crystal Spectrometers -- III. Solid State X-Ray Detectors -- IV. A Comparison of Crystal Spectrometers with Solid State X-Ray Detectors -- V. The Analysis of X-Ray Spectral Data -- References -- VIII Microanalysis of Thin Films and Fine Structure -- I. Introduction -- II. Factors Affecting X-Ray Spatial Resolution -- III. Characterizing the X-Ray-Excited Volume -- IV. Thin-Film Analysis -- V. Particles, Inclusions, and Fine Structures -- References -- IX Methods of Quantitative X-Ray Analysis Used in Electron Probe Microanalysis and Scanning Electron Microscopy -- I. Introduction -- II. The Absorption Factor kA -- III. Atomic Number Correction kZ -- IV. The Characteristic Fluorescence Correction kF -- V. The Continuum Fluorescence Correction -- VI. Summary Discussion of the ZAF Method -- VII. The Empirical Method for Quantitative Analysis -- VIII. Comments on Analysis Involving Elements of Atomic Number of 11 or Less -- IX. Quantitative Analysis with Nonnormal Electron-Beam Incidence -- X. Analysis Involving Special Specimen Geometries -- XI. Discussion -- Appendix. The Analysis of an Iron-Silicon Alloy -- References -- X Computational Schemes for Quantitative X-Ray Analysis: On-Line Analysis with Small Computers -- I. Introduction -- II. Summary of Computational Schemes for Quantitative Analysis -- III. The FRAME Program -- IV. Data Reduction Based on the Hyperbolic Method -- V. Summary -- References -- XI Practical Aspects of X-Ray Microanalysis -- I. Grappling with the Unknown -- II. Specimen Preparation for Quantitative Analysis -- III. Applications Involving Compositional Analysis -- References -- XII Special Techniques in the X-Ray Analysis of Samples -- I. Light Element Analysis -- II. Precision and Sensitivity in X-Ray Analysis -- III. X-Ray Analysis at Interfaces -- IV. Soft X-Ray Emission Spectra -- V. Thin Films -- Appendix. Deconvolution Technique -- References -- XIII Biological Applications: Sample Preparation and Quantitation -- I. Sample Preparation -- II. Analysis -- III. Summary -- References -- XIV Ion Microprobe Mass Analysis -- I. Basic Concepts and Instrumentation -- II. Ion Microscope -- III. Ion Microprobe -- IV. Production of Ions -- V. Sputtering -- VI. Qualitative Analysis -- VII. Quantitative Analysis -- VIII. Dead-Time Losses -- IX. In-Depth Profiling -- X. Applications -- References.

I Introduction.- I. Evolution of the Scanning Electron Microscope.- II. Evolution of the Electron Probe Microanalyzer.- III. Combination SEM-EPMA.- IV. Outline and Purpose of This Book.- References.- Bibliography of Texts and Monographs in SEM and EPMA.- II Electron Optics.- I. Electron Guns.- A. Tungsten Filament Cathode.- B. LaB6 Rod Cathode.- C. Field Emission Gun.- II. Electron Lenses.- A. General Properties of Magnetic Lenses.- B. Production of Minimum Spot Size.- C. Aberrations in the Electron Optical Column.- D. Design of the Final Lens.- III. Electron Probe Diameter dp vs. Electron Pro.